This book provides a concise and didactically structured presentation of nanotechnology as matters stand. Both students and engineers can gain valuable insights into the historical development, production, and characterization procedures of structures in the nanometer range, their electrical applications, measuring procedures for the determination of nanodefect, nanolayer, and nanoparticle characteristics, and the major techniques of preparation in nanotechnology. Based on known facts, an evaluation of nanotechnology, its further development, and its future prospects are attempted.